Special Issue on the Fourth Workshop on Physical Chemistry of Wet Etching of Silicon (PCWES)
Guest Editor, Mojtaba Kahrizi (Concordia University)

Research Reports

Simulation of Anisotropic Etching of Alpha-Quartz for Computer-Aided-Design System (SM0595)
Hisanori Hayashi and Toshitsugu Ueda, p.167
[Abstract (PDF File) | Full text (PDF File)]

Characterization of Orientation-Dependent Etching Properties of Quartz: Application to 3-D Micromachining Simulation System (SM0596)
Di Cheng, Kazuo Sato, Mitsuhiro Shikida, Atsushi Ono, Kenji Sato, Kazuo Asaumi and Yasuroh Iriye, p.179
[Abstract (PDF File) | Full text (PDF File)]

Arrhenius and Non-Arrhenius Behaviour During Anisotropic Etching (SM0597)
Miguel A. Gos?lvez, Risto M. Nieminen and Kazuo Sato, p.187
[Abstract (PDF File) | Full text (PDF File)]

Silicon Wet Etch Anisotropy: Analysis of the Impact of {111}-, {110}-, {100}- Terrace Widths (SM0598)
Irina Stateikina, Leslie M. Landsberger, Mojtaba Kahrizi, Nazmul Hoque and Victo Rossokhaty, p.199
[Abstract (PDF File) | Full text (PDF File)]

Regular Paper

A Novel Fiber Optic Biosensor for On-Line Monitoring of Cell Cultivation (SM0599)
Lei Zeng, Chu-Tian Zhang, Wei-Ning Huang, Jia Zhou, Quan Liu and Yi-Ping Huangg, p.211
[Abstract (PDF File) | Full text (PDF File)]

Polyvinyl Alcohol-co-Styrene Sulfonate/FeCl2 Composite as Humidity Sensing Material (SM0600)
Il-Jin Kim, Sang-Do Han, Ishwar Singh, Hi-Deok Lee and Jin Suk Wang, p.219
[Abstract (PDF File) | Full text (PDF File)]