Special Issue on Microvalves
Guest Editor, Albert K. Henning (Aquarian Microsystems/NanoInk, Inc.)

Preface

Research Papers

Development of MEMS-Based Piezoelectric Microvalve Technologies (SM0663)
Eui-Hyeok Yang, Choonsup Lee and J. M. Khodadadi, p.1
[Abstract (PDF File) | Full text (PDF File)]

Pneumatic MEMS In-Channel Microvalves with In-Plane Control Ports for Micro Fluidic Systems Integrated on a Chip Surface (SM0664)
Hidekuni Takao and Makoto Ishida, p.19
[Abstract (PDF File) | Full text (PDF File)]

Designing and Fabricating Electromagnetically Actuated Microvalves for MEMS Applications (SM0665)
J. Sutanto, R. Luharuka, P. J. Hesketh and Y. H. Berthelot, p.35
[Abstract (PDF File) | Full text (PDF File)]

Electrostatically Driven 3-Way Silicon Microvalve for Pneumatic Applications (SM0666)
Stephan Messner, Jochen Schaible, Peter Nommensen and Roland Zengerle, p.57
[Abstract (PDF File) | Full text (PDF File)]