Special Issue on Evaluation Methods for Material Properties of MEMS/NEMS Devices
Guest Editor, Kuniki Ohwada (Teikyo University)

Preface

Research Reports

Tensile Testing of Single-Crystal Silicon Thin Films at 600°C Using Infrared Radiation Heating (SM0784)
Toshiyuki Tsuchiya, Tetsuro Ikeda, Akifumi Tsunematsu, Koji Sugano and Osamu Tabata, p.1
[Abstract (PDF File) | Full text (PDF File)]

Tensile and Creep Characteristics of Sputtered Gold-Tin Eutectic Solder Film Evaluated by XRD Tensile Testing (SM0785)
Takahiro Namazu, Hideki Takemoto and Shozo Inoue, p.13
[Abstract (PDF File) | Full text (PDF File)]

Effect of Specimen Shape on Test Results of Au Freestanding Film Measured by Strip Bending Method (SM0786)
Jungmin Park, Jae-Hyun Kim, Sang-Joo Lee, Bongkyun Jang, Bung-Ik Choi and Hak-Joo Lee, p.25
[Abstract (PDF File) | Full text (PDF File)]

Development of Amplitude-Controlled Parallel-Fatigue-Test System for Micro-Electromechanical Resonators (SM0787)
Tsuyoshi Ikehara and Toshiyuki Tsuchiya, p.39
[Abstract (PDF File) | Full text (PDF File)]

Resonant Bending Fatigue Tests on Thin Films (SM0788)
Kwangsik Kwak, Masaaki Otsu and Kazuki Takashima, p.51
[Abstract (PDF File) | Full text (PDF File)]